ServicesA Leader in Ultra-Clean Parts

UCT is a global leader in ultra-high-purity (UHP) semiconductor chamber parts cleaning, performance coatings, and analytical verification. As node complexity advances, fabs must improve device performance while controlling manufacturing cost—driving higher expectations for chamber uptime, longer maintenance cycles, and consistent part performance.

Historically, chamber parts cleaning did not keep pace with the industry’s move towards increasingly tight clean specifications, and recycled parts often returned with widely variable contamination. As a result, fabs frequently relied on test wafer cycling to perform the final clean and verify performance—consuming metrology capacity, wafers, and production time.

UCT was the first to address this gap by developing ultra-high-purity (UHP) chamber parts cleaning validated with analytical methods and delivered with a Certificate of Analysis (CoA). We continue to maintain the highest standards in our services, resulting in reduced downtime, faster chamber start-up and more stable, repeatable process performance.

Ultra-Clean Parts

Improve Process Performance & Lower Cost of Ownership

Recycled chamber parts are central to chamber-level cost reduction, but they must meet near “new-part” micro-contamination standards. While new-part cleaning removes manufacturing residues, recycled parts require damage-free removal of deposited films to avoid particle variability and atomic-level contamination that can delay chamber recovery and destabilize process start-up.

Global Footprint. Local Execution.

UCT operates the industry’s largest global services footprint of its kind, enabling consistent support wherever fabs run. We use copy-exact process transfers across Advanced Technology Cleaning Centers and ChemTrace analytical laboratories to deliver the same UHP process worldwide — backed by in-house accredited analytics and CoA verification.

We continue to expand dock-to-dock access providing regional access to the full-service portfolio: parts cleaning, coatings, testing, and value-added solutions.

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