Mechatronics

Our engineering and manufacturing teams have decades of experience meeting the semiconductor equipment industry’s unique requirements. Process repeatability, precision and variation control are critical factors in ensuring high device yield in semiconductor manufacturing.

Placement of the wafer within the process chamber is critical. Repeatedly placing the wafer in the same location within a chamber requires tight control of all mechanical systems within the production tool, from the atmospheric and vacuum robots that transport the wafer to the chamber, to the pin-lift systems that position the wafer for processing.

Mechatronics

Our mechatronic experts engage in all aspects of the value chain to deliver solutions that meet critical customer product requirements including:

  • Modeling integrity and analyzing design intent to ensure accuracy of the provided documentation
  • Conducting system-level tolerance analysis to ensure consistent, predictable integration and performance
  • Leveraging robust supply chains to source critical material with short lead times
  • Testing equipment design to ensure that completed systems meet all operational requirements, including:
    • Robot controllers
    • Robots for wet & dry atmospheric applications
    • Track systems
    • Pre-aligners
    • High precision linear actuator assemblies