Gas & Chemical Delivery

Using state-of-the-art testing equipment and protocols, expert technicians ensure our customers’ systems always meet their stringent performance requirements.

Through our superior technical expertise in design and manufacturing, our chemical and gas delivery systems are the realization of Gordon Moore’s prediction about ever-shrinking transistors. Our turnkey systems permit the precise delivery, management and control of specialty gasses and chemicals in semiconductor and flat panel applications.

Gas Delivery

We are the semiconductor industry’s one-stop solution for gas delivery solutions, from initial design to final shipment to your customers. We provide precise delivery, management and control of specialty gasses and chemicals in flat panel and solar applications.

As the industry’s first turnkey gas delivery system manufacturer, we are a leader in enabling outsourcing strategies and experts in meeting the requirements of the highly configurable nature of wafer manufacturing equipment.

Chemical & Gas Delivery

In addition, we are a global leader in ultra-high purity (UHP) orbital and hand welding. Our rigorously trained and certified welding professionals apply the latest techniques and technologies to ensure perfect welds every time. Our broad range of capabilities includes small to large diameter fabrication, orbital welding, manual welding and precision tube bending. By combining robotics welding with hand craftsmanship, we have transformed the art of high-purity and orbital welding into a robust manufacturing science.

With final assembly in our class 100 and 1000 cleanrooms and state-of-the-art inspection methods, our expert technicians ensure our customers’ gas delivery systems meet the stringent cleanliness requirements that today’s leading-edge processes require.

Chemical Delivery

Production of plastic chemical delivery systems has been the focus of our Liberec CZ site for more than two decades. Repeatedly, we have reliably delivered liquid chemicals and precursors while precisely meeting all equipment requirements. Using state-of-the-art production methods, our expert welders fabricate the small subsystems, large all-plastic cabinets and exhaust ducting our customers need.

Our welding professionals routinely work with all forms of plastics, including PP, PVC, CPVC, PVDF, PFA and other FM 4910-approved materials. We ensure the integrity of chemical delivery systems by utilizing leading-edge capabilities, including infrared and hot gas welding. Our welding process is certified with CSN 05 0705 (050705). The weldments are leak tested using helium pressure and electrical permeability tests (spark tests). Fabricated parts are subject to digital 3D measurement inspection to ensure dimensional accuracy.

Weldments are integrated by our highly skilled manufacturing team with necessary high-purity PFA pipe tubing and precision PFA tube bending. To deliver chemical delivery system modules and subsystems in clean and ready to install condition, the final integration is performed in our class 10,000/ISO 7 cleanroom.