Advanced Coating

Improving Your Productivity with Proprietary Performance Coating

Our proprietary coatings are used primarily for etch and PVD tool parts and used to protect the tool surface as well as aid in layer removal during the cleaning and refurbishment process.

These coatings along with our proprietary environmentally clean processes allow for shorter lead times, longer part life, lower surface contamination and process enhancements. UCT's service unit, QuantumClean, provides coating advantages:

Sacrificial coating for PVD applications using TWAS suite of coatings:

Strong surface adhesion to the part
Low porosity with rougher surface—improved deposition adhesion
Clean surface that is low in metallic and organic impurities as well as particles

Protective coatings for etch applications using plasma spray suite of coatings:

Strong surface adhesion
Low porosity
Smooth, hard surface
Improved resistance to etch products
Superior di-electric properties

QuantumClean is constantly developing new coating, removal and clean processes in our laboratories and now offer these coatings in most of the major semiconductor locations. We offer a line of C-coats for PVD and M-coat for etch. Work is also on-going for other applications that require a coating or surface modification to lower the cost-of-ownership for our customers.

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