These papers and abstracts are the products of several collaborations with leading-edge companies in the semiconductor industry. We gratefully acknowledge these companies for their generous contributions to these projects as well as our co-authors: John Grob, BOC Gases; Olivier Laparra, Ph.D., VLSI Technology Inc.; Allan Laser, (formerly of VLSI Technology Inc.), Silicon Valley Group; Kevin Siefering, Ph.D., Airco/BOC Electronic Gases; and Andrew Tudhope, VLSI Technology Inc.

Our technical publications summarize conference proceedings and papers published in trade publications written by UCT technical staff. These papers describe and discuss technical concepts and applications of gas delivery systems for semiconductor process equipment manufacturing. Product names used herein, other than those trademarked by Ultra Clean Technology, are trademarks of their respective companies.

"A Feasibility Study of Chromium-Rich Oxide-Passivated Stainless Steel Tubing for Gas Delivery Systems"   Originally published July 1999 (PDF Document)

"Examining the Corrosion Resistance of Chromium-Passivated Stainless-Steel Tubes"

"Cost Versus Benefit of Fully Integrated Gas DeliverySystems"

"Weld-Site Contribution to Moisture Dry-Down in Tubing Using APIMS"

"Effect of Design and Choice of Materials on the Integrity of a Gas Delivery System"

"Investigating the Corrosion Resistance of Heat-Affected Zones in CrP Tubing"

"Site-Specific Corrosion in the Gas Delivery Tubing Exposed to Semiconductor Grade HCl"

"Case Study: Ultraclean Gas Delivery"