Mechatronics

With decades of experience meeting the unique requirements of the semiconductor equipment industry, UCT’s engineering and manufacturing teams deliver mechanical control and placement precision for process repeatability and high yield.

Process repeatability and controlling variation are critical factors in ensuring high device yield in semiconductor manufacturing. Placement of the wafer within the process chamber is key. Repeatedly placing the wafer in the same location within a chamber requires tight control of all mechanical systems within the production tool from the atmospheric and vacuum robots that transport the wafer to the chamber to the pin-lift systems within the chamber that position the wafer on the chamber stage for processing.

Our mechatronic experts engage in all aspects of the value chain to deliver the solutions needed to meet critical customer product requirements:

  • Modelling integrity and analysis to understand design intent and ensure accuracy of provided documentation   
  • Conducting system-level tolerance analysis to ensure consistent and predictable integration and performance that meets overall required precision and accuracy requirements    
  • Leveraging robust supply chain to source critical material with short lead times
  • Testing equipment design to validate that completed systems meet all operational requirements Semiconductor precision mechanisms and wafer handling systems including:
    • Robot controllers
    • Robots for wet and dry atmospheric applications
    • Track systems
    • Pre-aligners
    • High precision linear actuator assemblies

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UCT is committed to making our website's content accessible and user friendly to everyone. If you are having difficulty viewing or navigating the content on this website, or notice any content, feature, or functionality that you believe is not fully accessible to people with disabilities, please contact our Customer Service team at Accessibility@uct.com with “Disabled Access” in the subject line and provide a description of the specific feature you feel is not fully accessible or a suggestion for improvement. We take your feedback seriously and will consider it as we evaluate ways to accommodate all of our customers and our overall accessibility policies. Additionally, while we do not control such vendors, we strongly encourage vendors of third-party digital content to provide content that is accessible and user friendly.

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