"Testing Protocol for Moisture Outgassing of MFCs by APIMS," Proceedings of Evaluating Contamination in Mass Flow Controllers, Microcontamination 94, San Jose CA, October 1994.
Abstract: Ensuring ultra high purity (UHP) gases at the point-of-use has been a goal of semiconductor manufacturers since device fabrication began. This involves at least two elements: the purity of the gas supply and the extent of contamination contributed by the gas delivery systems while carrying process gases to the point-of-use. Of all components used in gas delivery systems the electronic mass flow controller (MFC) is perhaps the most complex and the most expensive. For these two reasons reliable testing protocols must be used to test various aspects of the component and also to confirm the overall value that higher prices confer. Complexity includes evolving electronics and related control systems including using true digital electronics based designs and increasing requirements related to microcontamination issues. The semiconductor industry's ultra large scale integration (ULSI) requirements for processing are increasing the demands for higher performance of components in areas such as particulate generation as well as outgassing. Although many test procedures have been proposed and are in use to varying degrees, this paper addresses specific applications of an atmospheric pressure ionization mass spectrometer (APIMS) to differentiate outgassing performance for MFCs. This work was based on the technical collaboration between Ultra Clean Technology and the BOC Group, Inc. |
