"Site-Specific Corrosion in the Gas Delivery Tubing Exposed to Semiconductor Grade HCl," Solid State Technology, Supplement, Vol 38, No 10, October 1995.
Abstract: Corrosion and corrosion-induced particulate localized to the vicinity of welds have been observed in stainless-steel tubing used for HCl gas delivery. These effects were attributed to manganese (Mn) outgassing generated by heat at the weld site, and subsequent redeposition in the heat affected zone (HAZ). The mechanisms and causes for the resulting corrosion effects are presented in this article. Corrosion was minimized by a judicious choice of material and welding parameters such as using tubing with a low Mn concentration, increasing the welding speed, and performing post-weld rinsing. |
