07.12.04
ULTRA CLEAN TECHNOLOGY TO MAKE PRESENTATION ON "IN SITU MASS FLOW
VERIFICATION" AT SEMI TECHNOLOGY SYMPOSIUM
MENLO PARK, CA, July 12, 2004 — Ultra Clean Technology
has announced that Dr. Mohamed Saleem will present a paper entitled "In
Situ Mass Flow Verification for Semiconductor Processing" in the
STS:ISM Contamination Free Manufacturing technical symposium of SEMICON
West 2004 (San Francisco, CA July 12-14, 2004). Dr. Saleem will speak
on Monday, July 12, as part of the morning program, scheduled for 9:00am
to 12:00pm. Session 102-CFM, as well as Session 105-CFM will be co-chaired
by Dr. Sowmya Krishnan, UCT's Vice President of Technology and
Chief Technology Officer. This participation is part of UCT's active
and on-going role in industry technology symposia. The sessions will
be conducted at the San Francisco Marriott Hotel.
In the nanometer-era of semiconductor manufacturing, decreasing
device geometries require stringent control of the delivery of gases to
the process tools. Controlling gas delivery, in turn, requires accurate
flow control devices such as mass-flow controllers (MFCs). Compact mass
flow verification (MFV) components have been developed to allow for the
calibration of MFCs in situ the gas delivery subsystem, providing the accuracy
of external MFV tools without needing to remove MFCs from the process tool.
UCT has developed methods to evaluate MFV performance against industry
standard test equipment. This has improved performance requirements designed
to meet demanding industry standards and customer requirements.
The SEMI Technology Symposium (STS) on Innovations in Semiconductor
Manufacturing (ISM) features papers that address practical solutions to
current problems. Individual sessions will focus on a variety of subjects:
strained-silicon technology, advanced wafer processing, interconnect technology,
planarization processes, in situ metrology, contamination free manufacturing,
MEMS technology and EHS issues. Registration for the symposium is through
SEMI (www.semi.org).
Sowmya Krishnan, PhD, is Vice President of Technology and
Chief Technology Officer at Ultra Clean Technology. In this position
she oversees the technology and product development areas for semiconductor
gas- and liquid-delivery systems. She has chaired the Standards Task
forces at SEMI, and has chaired sessions on contamination-free manufacturing
and gas delivery at SEMICON West, SEMICON Southwest, and CleanRooms
West. Dr. Krishnan has authored several technical papers and editorials
in the fields of microcontamination and semiconductor processing.
She received MS and PhD degrees in chemical engineering from Clarkson
University in Potsdam, NY.
Mohamed Saleem, PhD, is Manager, Technology and Product
Development at Ultra Clean Technology. An active participant in SEMI
standards task forces for gas-panels, corrosion, surface-analysis,
and stainless-steel, Dr. Saleem has published several papers in the
field of materials science and has presented many papers at major
industry conferences. He received his MS in chemical engineering
from Tufts University in Medford, MA, and a PhD in materials science
and engineering from the University of Florida in Gainsville.
Ultra Clean Holdings, Inc. is a developer and supplier of critical subsystems
for the semiconductor capital equipment industry, focusing on gas delivery
systems. Ultra Clean offers its customers a complete outsourced
solution for gas delivery systems, improved design-to-delivery cycle
times, component neutral design and manufacturing and component testing
capabilities. Ultra Clean's customers are primarily original
equipment manufacturers of semiconductor capital equipment. The
Company is headquartered in Menlo Park, California. Additional
information is available at www.uct.com.
